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Questor - Photolithography

Questor - Photolithography

Play the Questor Game to answer questions on photolithography. The objective is to explain the three (3) primary stages of the photolithography process. -Describe the steps the photolithography equipment uses to process a pattern on a silicon wafer. -Describe the coater equipment modules and their purposes. -Describe the purpose of the exposure equipment. -Describe the four printing methods. -Describe the purpose of the primary subsystems of an exposure tool. -Describe the process steps and recipe settings for a coater, an exposure tool, and a developer.

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