Material Detail

Questor - Photolithography

Questor - Photolithography

Play the Questor Game to answer questions on photolithography. The objective is to explain the three (3) primary stages of the photolithography process. -Describe the steps the photolithography equipment uses to process a pattern on a silicon wafer. -Describe the coater equipment modules and their purposes. -Describe the purpose of the exposure equipment. -Describe the four printing methods. -Describe the purpose of the primary subsystems of an exposure tool. -Describe the process steps and recipe settings for a coater, an exposure tool, and a developer.


  • User Rating
  • Comments
  • Learning Exercises
  • Bookmark Collections
  • Course ePortfolios
  • Accessibility Info

More about this material


Log in to participate in the discussions or sign up if you are not already a MERLOT member.