6.152J / 3.155J Micro/Nano Processing Technology
Peer Review for material titled "6.152J / 3.155J Micro/Nano Processing Technology"
User Rating for material titled "6.152J / 3.155J Micro/Nano Processing Technology"
Member Comments for material titled "6.152J / 3.155J Micro/Nano Processing Technology"
Personal Collections for material titled "6.152J / 3.155J Micro/Nano Processing Technology"
Learning Exercises for material titled "6.152J / 3.155J Micro/Nano Processing Technology"
Accessibility Info for material titled "6.152J / 3.155J Micro/Nano Processing Technology"
Search all MERLOT
Click here to go to your profile
Select to go to your workspace
Click here to go to your Dashboard Report
Click here to go to your Content Builder
Click here to log out
Search Terms
Enter username
Enter password
Please give at least one keyword of at least three characters for the search to work with. The more keywords you give, the better the search will work for you.
select OK to launch help window
cancel help

MERLOT II




        

Search > Material Results >

6.152J / 3.155J Micro/Nano Processing Technology

        

6.152J / 3.155J Micro/Nano Processing Technology

Logo for 6.152J / 3.155J Micro/Nano Processing Technology
This course introduces the theory and technology of micro/nano fabrication. Lectures and laboratory sessions focus on basic processing techniques such as diffusion, oxidation, photolithography, chemical vapor deposition, and more. Through team lab assignments, students are expected to gain an understanding of these processing techniques, and how they are applied in concert to device fabrication. Students enrolled in this course have a unique opportunity to fashion and test micro/nano-devices,... More
Material Type: Online Course
Date Added to MERLOT: August 10, 2012
Date Modified in MERLOT: August 10, 2012
Author:

Details

  • Reviewed by members of Editorial board for inclusion in MERLOT.
    Editor Review (not reviewed)
  • User Rating (not rated)
  • Comments (none)
  • Learning Exercises (none)
  • Personal Collections (none)
  • Accessibility Info (none)

About

Primary Audience:
Mobile Compatibility: Not specified at this time
Language: English
Cost Involved: no
Source Code Available: unsure
Accessiblity Information Available: unsure
Creative Commons: Creative Commons License
This work is licensed under a Attribution-NonCommercial-ShareAlike 3.0 United States

Connections





QR Code for this Page

Browse in Categories

Discussion

Discussion for 6.152J / 3.155J Micro/Nano Processing Technology

Log in to participate in the discussions or Register if you are not already a MERLOT member.

Return to Top of Page