Material Detail

6.780 Semiconductor Manufacturing | Electrical Engineering and Computer Science

6.780 covers statistical modeling and the control of semiconductor fabrication processes and plants. Topics covered include: design of experiments, response surface modeling, and process optimization; defect and parametric yield modeling; process/device/circuit yield optimization; monitoring, diagnosis, and feedback control of equipment and processes; and analysis and scheduling of semiconductor manufacturing operations.... Show More

Keywords:: control chart, spatial variation, design for manufacturability, environmental, yield learning, control chart design, distributions, statistical process control, planning, estimation, equipment diagnosis, equipment monitoring, yield models, process modeling, statistics, design of experiments, spatial models, Computational Modeling and Simulation, hypothesis testing, factory operation, Electronics, multistage process control, factory modeling, Electronic Materials, Process Control Systems, run by run, equipment control, empirical equipment, advanced process control, factory infrastructure, experimental design, factory design, Semiconductor manufacturing, health and safety, computer integrated manufacturing, Electrical Engineering, scheduling

Disciplines:

Science and Technology / Engineering / Electrical Engineering

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More about this material

Material Type:: Online Course
Date Added to MERLOT:: May 12, 2016
Date Modified in MERLOT:: May 12, 2016
Author:: Unknown (Know the author?)
Submitter:: Barbra Bied Sperling

Primary Audience:: Graduate School
Technical Format:: Website
Mobile Compatibility:: Not specified at this time
Language:: English
Cost Involved:: No
Source Code Available:: No
Creative Commons:: This work is licensed under a Attribution-NonCommercial-ShareAlike 3.0 United States