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Cleanroom Protocol

Cleanroom Protocol

This is a description for a learning module from Maricopa Advanced Technology Education Center. This PDF describes the module; access may be purchased by visiting the MATEC website. The final module of MATEC's contamination curriculum develops your learners' skills in specific cleanroom protocols: wafer handling and transfer, area wipedowns, and area or equipment isolation. The instruction stresses that contaminants travel via many channels- air, people, process equipment, manufacturing process, wiping materials, wafer handling, electrostatic discharge, and chemicals. MATEC aims to make each learner acutely aware that minimizing contamination in the cleanroom requires his or her personal commitment. The module also discusses the automated systems used in modern and upcoming 300-mm fabs.

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