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RF Impedance Matching

RF Impedance Matching

This is a description for a learning module from Maricopa Advanced Technology Education Center. This PDF describes the module; access may be purchased by visiting the MATEC website. This module addresses impedance matching techniques which are related to the goal of ensuring quality and consistency in RF/plasma manufacturing processes. Upon completion of this module, learners will be familiar with typical plasma loads in RF systems, common impedance matching methods, common LC networks, and the types of variable components in impedance matching. Learners receive practice and are assessed on skills for calculating values for impedance matching variables such as: inductance and capacitance, equivalent impedance of an L-network with load, resonant frequency of a matching network, Q and bandwidth, and range of inductance.


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