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Mass Flow Controllers

Mass Flow Controllers

This is a description for a learning module from Maricopa Advanced Technology Education Center. This PDF describes the module; access may be purchased by visiting the MATEC website. In this module MATEC guides your Learners through the operation of a mass flow controller (MFC) as it is used in gas delivery systems. They will master the terminology of MFCs, from thermal sensor to linearity and surrogate gas. They will come to understand the effect of different gases on MFC operation, calculate MFC setpoints and interpret calibration curves. Process problems and troubleshooting will be addressed and, to test their understanding, your learners will calculate the operating setpoint for four gas flow rates, given four different process gases.


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