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Ion Implant
This website includes an animation which illustrates the ion implant process. Objective: Name the three common dopants used in implantation processes and explain the process of generating an ion beam from source to wafer. You can find this animation under the heading "Process & Equipment III." This simulation is from Module 026 of the Process & Equipment III Cluster of the MATEC Module Library (MML). To view other clusters or for more information about the MML visit http://matec.org/ps/library3/process_I.shtmlKey
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