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"Hierarchical Physical Models for Analysis of Electrostatic Nanoelectromechanical Systems (NEMS)" icon

Hierarchical Physical Models for Analysis of Electrostatic Nanoelectromechanical Systems (NEMS)

This talk will introduce hierarchical physical models and efficient computational techniques for coupled analysis of electrical, mechanical and van der Waals energy domains encountered in NEMS. Numerical results will be presented for several silicon nanoelectromechanical switches to understand the static electromechanical pull-in behavior.
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