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"Vertically Aligned Carbon Nanotube for Interconnects and Nanoelectrode Based Biosensors" icon

Vertically Aligned Carbon Nanotube for Interconnects and Nanoelectrode Based Biosensors

In the past few years, tremendous progress in the growth of carbon nanotubes (CNTs) has been made, which enabled the fabrication of various CNT devices for applications in electronics, biomedical techniques, and chemical/biological sensors. We have established a process to grow vertically aligned multi-walled CNTs (MWCNTs) using DC-biased plasma enhanced chemical vapor deposition (PECVD). These MWCNTs have been integrated, using a bottom-up approach, for (1) CNT interconnects and (2) nanoelectrode arrays for ultrasensitive DNA detection, both of which rely on MWCNT arrays embedded in SiO2 with detection, both of which rely on MWCNT arrays embedded in SiO2 with only the very end exposed at the surface of SiO2 matrix. By depositing patterned metal contacts at the top surface, the embedded... Show More

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