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Nanoscale Materials and Structures for CMOS Devices

Nanoscale Materials and Structures for CMOS Devices

This presentation was given at the Arizona Nanotechnology Conference in March of 2008 by Dr. Stefan Zollner, Freescale Semiconductor, USA. The focus is on problems with planar CMOS and their solutions. These solutions consist of: SOI or FINFET to reduce source and drain leakage, high mobility channel materials to increase drive current, new silicide materials to reduce source and drain contact resistance, metal oxides with high dielectric constants to reduce gate leakage and metal gate electrodes to reduce gate depletion. Overall, the presentation is filled with images and diagrams allowing it to flow easily. This is an excellent resource for anyone looking to learn more about nanotechnology and its applications.

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