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Material Detail

Questor - Photolithography

Questor - Photolithography

Play the Questor Game to answer questions on photolithography. The objective is to explain the three (3) primary stages of the photolithography process. -Describe the steps the photolithography equipment uses to process a pattern on a silicon wafer. -Describe the coater equipment modules and their purposes. -Describe the purpose of the exposure equipment. -Describe the four printing methods. -Describe the purpose of the primary subsystems of an exposure tool. -Describe the process steps and recipe settings for a coater, an exposure tool, and a developer.
Keywords:
stem education, workforce development, technician training, advanced technological education
Disciplines:
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More about this material

Material Type:
Animation
Date Added to MERLOT:
July 18, 2016
Date Modified in MERLOT:
July 18, 2016
Author:
Submitter:
Barbra Bied Sperling
Hispanic Serving Institution
Primary Audience:
Grade School, Middle School, High School, College General Ed, College Lower Division, College Upper Division, Graduate School, Professional
Technical Format:
Website, Flash
Mobile Compatibility:
Not specified at this time
Language:
English
Cost Involved:
No
Source Code Available:
No
Creative Commons:
No

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