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Wet Oxidation Process

Wet Oxidation Process

In this YouTube video, created by�Southwest Center for Microsystems Education (SCME), viewers can watch an animation on the wet oxidation process. This animation "illustrates the chemistry of a wet thermal oxidation process that is used to grow silicon dioxide (SiO2) on a silicon (Si) wafer. In a wet oxidation process, water vapor (H2O) interacts with the silicon atoms at the SiO2-Si interface to form SiO2. This process is discussed in more detail in the Deposition Overview for MEMS Learning Module" found on the SCME�website.
Keywords:
stem education, workforce development, technician training, advanced technological education
Disciplines:
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More about this material

Material Type:
Reference Material
Date Added to MERLOT:
August 3, 2016
Date Modified in MERLOT:
August 3, 2016
Author:
Submitter:
Barbra Bied Sperling
Hispanic Serving Institution
Primary Audience:
Grade School, Middle School, High School, College General Ed, College Lower Division, College Upper Division, Graduate School, Professional
Technical Format:
Video
Mobile Compatibility:
Not specified at this time
Language:
English
Cost Involved:
No
Source Code Available:
No
Creative Commons:
No

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