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Wafer Backside Anisotropic Wet Etching of Silicon

Wafer Backside Anisotropic Wet Etching of Silicon

This animation, created by�Southwest Center for Microsystems Education (SCME), illustrates how the "wafer backside anisotropic wet etching of silicon is used to form the pressure sensor chamber." Further information and resources can be found on the SCME website.

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