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MEMS Pressure Sensor Backside Etch

MEMS Pressure Sensor Backside Etch

This animation, created by�Southwest Center for Microsystems Education (SCME), "�illustrates the anisotropic etch on the backside of a silicon wafer. The chamber formed as a result of this etch is used as the reference chamber for a micro-pressure sensor." Viewers can find supporting Learning Modules and activities from the SCME website under Educational Materials.... Show More


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