1. Home
  2. Material Detail: MEMS Pressure Sensor Backside Etch

Material Detail

MEMS Pressure Sensor Backside Etch

MEMS Pressure Sensor Backside Etch

This animation, created by�Southwest Center for Microsystems Education (SCME), "�illustrates the anisotropic etch on the backside of a silicon wafer. The chamber formed as a result of this etch is used as the reference chamber for a micro-pressure sensor." Viewers can find supporting Learning Modules and activities from the SCME website under Educational Materials.... Show More
Keywords:
stem education, workforce development, technician training, advanced technological education
Disciplines:
Go to Material  
Bookmark / Add to Course ePortfolio
Create a Learning Exercise
Add Accessibility Information
Rate
Add a Comment

Quality

  • Editor Reviews
  • User Rating
  • Comments
  • Learning Exercises
  • Bookmark Collections
  • Course ePortfolios
  • Accessibility Info

More about this material

Material Type:
Presentation
Date Added to MERLOT:
August 3, 2016
Date Modified in MERLOT:
February 25, 2021
Author:
Submitter:
Barbra Bied Sperling
Primary Audience:
Grade School, Middle School, High School, College General Ed, College Lower Division, College Upper Division, Graduate School, Professional
Technical Format:
Video
Mobile Compatibility:
Not specified at this time
Language:
English
Cost Involved:
No
Source Code Available:
No
Accessibility Information Available:
Unknown
Creative Commons:
No

Browse...

Disciplines with similar materials as MEMS Pressure Sensor Backside Etch
People who viewed this also viewed
Other materials like MEMS Pressure Sensor Backside Etch

Comments

Log in to participate in the discussions or sign up if you are not already a MERLOT member.