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MEMS Cantilevers - Sacrificial Layer Removal

MEMS Cantilevers - Sacrificial Layer Removal

This animation, created by�Southwest Center for Microsystems Education (SCME), "illustrates the removal or etch of the sacrificial layer of silicon dioxide. Removing this layer allows the micro-cantilevers to move. Such cantilevers are used as sensors for a variety of applications." The supporting MEMS Cantilever Learning Modules and activities can be downloaded from the SCME website under Educational Materials.... Show More


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