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Material Detail

MEMS Cantilevers - Sacrificial Layer Removal

MEMS Cantilevers - Sacrificial Layer Removal

This animation, created by�Southwest Center for Microsystems Education (SCME), "illustrates the removal or etch of the sacrificial layer of silicon dioxide. Removing this layer allows the micro-cantilevers to move. Such cantilevers are used as sensors for a variety of applications." The supporting MEMS Cantilever Learning Modules and activities can be downloaded from the SCME website under Educational Materials.... Show More
Keywords:
stem education, workforce development, technician training, advanced technological education
Disciplines:
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More about this material

Material Type:
Presentation
Date Added to MERLOT:
August 3, 2016
Date Modified in MERLOT:
August 3, 2016
Author:
Submitter:
Barbra Bied Sperling
Primary Audience:
Grade School, Middle School, High School, College General Ed, College Lower Division, College Upper Division, Graduate School, Professional
Technical Format:
Video
Mobile Compatibility:
Not specified at this time
Language:
English
Cost Involved:
No
Source Code Available:
No
Accessibility Information Available:
Unknown
Creative Commons:
No

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