Material Detail

Plasma & RF Fundamentals

Plasma & RF Fundamentals

This is a description for a learning module from Maricopa Advanced Technology Education Center. This PDF describes the module; access may be purchased by visiting the MATEC website. One third of modern semiconductor process steps and a variety of other applications employ plasma technology. RF energy is commonly used to generate and maintain a plasma which accelerates chemical processes or provides other desired outcomes such as light emission. This module is the first in a series that builds a knowledge foundation for understanding plasma technology and RF energy. Concepts and principles covered include particle behavior under plasma conditions, changes in electromagnetic wave forms, and related variables that affect RF/plasma applications.


  • User Rating
  • Comments
  • Learning Exercises
  • Bookmark Collections
  • Course ePortfolios
  • Accessibility Info

More about this material


Disciplines with similar materials as Plasma & RF Fundamentals


Log in to participate in the discussions or sign up if you are not already a MERLOT member.